| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique for detecting the cracking of a substrate carried in equipment without opening the equipment, when the substrate introduced into the equipment is cracked. Ž<P>SOLUTION: A microphone 61 monitors sound in a heat space V immediately after flash heating treatment by a flash lamp 41 to obtaine an acoustic signal. A crack occurrence detection section 63 determines whether cracking sound is included in the acoustic signal obtained by the microphone 61 (concretely, the acoustic signal obtained by the microphone 61 while a prescribed frequency region is removed by a filter circuit 62), thus determining whether the substrate W carried in the equipment has cracked. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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