| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide: a stacked piezoelectric element that can suppress the decline of a displacement amount by drive for a long period of time and that is used in a driving element (piezoelectric actuator); a sensor element; and a circuit element. <P>SOLUTION: The stacked piezoelectric element includes a unit stack comprising an internal electrode 5, a piezoelectric layer 3 and a metal covering layer 11 formed on the surface of the internal electrode 5. The plurality of unit stacks are stacked. For the metal covering layer 11, a crystal is oriented in a prescribed direction. Also, for the piezoelectric layer 3, the crystal is oriented in a polarization axis direction. When many grain boundaries and amorphous parts exist inside the metal covering layer 11, the part is easily eroded by stress or the fluid of atmosphere, but erosion is suppressed since the crystal of the metal covering layer 11 is oriented in a prescribed direction. Thus, since the durability of the metal covering layer 11 is improved, failures such as the peeling of the piezoelectric layer 3 and cracks of the piezoelectric layer 3 are suppressed, and the stacked piezoelectric element having excellent durability is achieved. <P>COPYRIGHT: (C)2010,JPO&INPIT |
