APPARATUS FOR INSPECTING SILICON STRUCTURE UTLIZING A GALBANOMETER SCANNEER AND METHOD OF INSEPECTING SILICON STRUCTURE UTILIZING THE SAME

摘要

PURPOSE: A silicone structure detector and a detecting method using a galvanometer scanner inspecting laser light in a silicon structure are provided to simply inspect the state of a silicon structure by scanning the silicon wafer. CONSTITUTION: A silicone structure detector and a detecting method using a galvanometer scanner inspecting laser light in a silicon structure include a light source(31), an x-axis mirror, a y-axis mirror, an x-axis galvanometer, a y-axis galvanometer and a light detector. The light source outputs the laser light. The x-axis mirror and y-axis mirror reflect the laser light. The optical detector measures the power of the laser light in which it penetrates the silicone structure.