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发明名称
Vorrichtung zur Ionenimplantation
摘要
申请公布号
DE602005016258(D1)
申请公布日期
2009.10.08
申请号
DE200560016258T
申请日期
2005.09.27
申请人
SHARP K.K.
发明人
SOHTOME, YOSHIHIRO
分类号
H01J37/317;C23C14/50;C23C14/56;H01J37/18
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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Jaucherühreinrichtung
Entmisteranlage
Verfahren zur Herstellung von Sauerrahmbutter
