| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a setter for heat treatment of a glass substrate, wherewith the glass substrate such as a flat panel display substrate hardly slip. <P>SOLUTION: The setter thermally treats the glass substrate by putting it on the upper surface, has 0-10×10<SP>-7</SP>/°C thermal expansion coefficient at 20-600°C, and is composed of a porous ceramic sintered body comprising communicating holes of a three-dimentional reticular structure. The setter preferably has an air permeability of 0.5-10×10<SP>-3</SP>cm<SP>2</SP>, and tis preferably composed of a lithia sintered body. <P>COPYRIGHT: (C)2010,JPO&INPIT |
