发明名称 |
MULTI-BEAM EXPOSURE APPARATUS |
摘要 |
<P>PROBLEM TO BE SOLVED: To improve a multi-beam exposure apparatus for scanning a plurality of beams. Ž<P>SOLUTION: This multi-beam exposure device 1 includes Σ(Ni-1) pieces of half mirrors 11 for combining ΣNi pieces of light into M pieces of light beam groups; M sets of finite lenses 8 for imparting positive power of a larger absolute value than the main scanning direction in the subscanning direction to be further converged in the subscanning direction; a combining reflecting mirror 13 for reflecting the M pieces of light beam groups so as to substantially overlap the first direction; a deflector 5 for deflecting the combined M pieces of light beam groups; and dustproof glass 14, inclined in the reverse direction of the inclining direction of the half mirrors, in a front stage of the deflector; and can reduce the influence of coma aberrations applied to the M pieces of light beam groups by the half mirrors. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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申请公布号 |
JP2009223335(A) |
申请公布日期 |
2009.10.01 |
申请号 |
JP20090154298 |
申请日期 |
2009.06.29 |
申请人 |
TOSHIBA CORP;TOSHIBA TEC CORP |
发明人 |
SHIRAISHI TAKASHI;YAMAGUCHI MASAO;FUKUTOME YASUYUKI |
分类号 |
G02B26/10;B41J2/44;H04N1/113 |
主分类号 |
G02B26/10 |
代理机构 |
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地址 |
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