| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical displacement measuring apparatus capable of measuring displacement of a measurement object by increasing degree of freedom of length of a lens tube section introducing light into the measurement object from a light source. SOLUTION: The optical displacement measuring apparatus 10 includes a lens tube section 22 introducing light from a light source 70 into an objective optical system as outward light 82, a prism optical element 26 and a mirror optical element 28 as an objective optical system guiding outward light 82 to the lateral face 6 of a case 8 by changing light path and refracting specular reflection light from the lateral face 6 to return to the lens tube section 22 as return trip light 84 parallel to outward light 82, an imaging lens 76 possessing an optical axis 86 parallel to outward light 82 to condense return trip light, a pinhole optical element 78 arranged at a focal position of the imaging lens 76 to pass only return trip light 84 parallel to outward trip light 82, and a light position detecting device 80 detecting a position of light passing through the pinhole optical element 78. COPYRIGHT: (C)2010,JPO&INPIT
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