发明名称 METALLIC NANOCRYSTAL PATTERNING
摘要 <p>A device and method include forming a mask on a substrate supporting a plurality of metallic nanocrystals such that a portion of the metallic nanocrystals is exposed. Protective shells are formed about the exposed metallic nanocrystals. Unprotected metallic nanocrystals are removed.</p>
申请公布号 WO2009118354(A1) 申请公布日期 2009.10.01
申请号 WO2009EP53540 申请日期 2009.03.25
申请人 ATMEL ROUSSET SAS;COMMISSARIAT A L'ENERGIE ATOMIQUE;DUFOURCQ, JOEL;VANDROUX, LAURENT;MUR, PIERRE;BODNAR, SYLVIE 发明人 DUFOURCQ, JOEL;VANDROUX, LAURENT;MUR, PIERRE;BODNAR, SYLVIE
分类号 H01L29/423;H01L21/28;H01L29/788 主分类号 H01L29/423
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