A1N BULK SINGLE CRYSTAL, SEMICONDUCTOR DEVICE USING THE SAME AND METHOD FOR PRODUCING THE SAME
摘要
<p>Disclosed is an AlN single crystal bulk, which, even when a single crystal of a dissimilar material is used as a crystal, suffers from no significant defects and has high quality. Also disclosed are a process for producing the AlN single crystal bulk and a semiconductor device. The production process is characterized in that a plane inclined by 10 to 80 degrees to a C plane is selected as a surface (1a) of a hexagonal single crystal substrate which is a seed crystal (1) (Fig. 1 (a)) and an AlN single crystal (2) is grown as a growth plane (2a) on the surface (1a) by a sublimation method (Fig. 1(b)).</p>
申请公布号
CA2719826(A1)
申请公布日期
2009.10.01
申请号
CA20092719826
申请日期
2009.03.26
申请人
JFE MINERAL COMPANY, LTD.;FRIEDRICH-ALEXANDER-UNIVERSITAET ERLANGEN-NUERNBERG;CRYSTAL-N GMBH
发明人
NAGATA, SHUNRO;WINNACKER, ALBRECHT;EPELBAUM, BORIS M;BICKERMANN, MATTHIAS;FILIP, OCTAVIAN;HEIMANN, PAUL