发明名称 |
METHOD OF MANUFACTURING MAGNETIC HEAD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic head which suppresses degradation of yield and is suited for reducing the size of a reading element. Ž<P>SOLUTION: This method comprises: a step (a) for forming a laminate film 12 providing a magneto-resistance effect on a substrate; a step (b) for forming a first recess 20 by removing the laminate film from magnetic domain control areas MC defined in both sides of a reading element area RE on the surface of the substrate; a step (c) for forming a magnetic domain film 27 in the first recess and on the laminate film; a step (d) for patterning the magnetic domain film so as to leave the magnetic domain control film in the area of a part adjacent to the edge of the first recess in the first recess or on the upper surface of the laminate film; and a step (e) for polishing a part of the magnetic domain control film to remove it under conditions that the magnetic domain control film remains in the first recess. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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申请公布号 |
JP2009224000(A) |
申请公布日期 |
2009.10.01 |
申请号 |
JP20080069912 |
申请日期 |
2008.03.18 |
申请人 |
FUJITSU LTD |
发明人 |
KISHII SADAHIRO;NAGASAKA KEIICHI;WAKABAYASHI YASUHIRO;ENDO HIROSHI;HASHIMOTO JUNICHI;HORIGUCHI HIROSHI;EGUCHI SHIN |
分类号 |
G11B5/39;H01L43/08;H01L43/12 |
主分类号 |
G11B5/39 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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