发明名称 |
OPTICAL MEMBER, LIGHT ROUTING UNIT, AND EXPOSURE APPARATUS |
摘要 |
<p>Embodiment of the present invention is to provide an optical member composed of calcium fluoride (fluorite) and being capable of preventing deterioration and demonstrating a long life even in use under severe conditions. An optical member of a preferred embodiment has a base material having an entrance face into which light is incident, a total reflection face totally reflecting the incident light, and an exit face from which the totally reflected light emerges to the outside, and made of a calcium fluoride crystal; and a protecting layer to control deterioration of the total reflection face by the light, which is provided on a surface outside the total reflection face in this base material.</p> |
申请公布号 |
WO2009119780(A1) |
申请公布日期 |
2009.10.01 |
申请号 |
WO2009JP56210 |
申请日期 |
2009.03.19 |
申请人 |
NIKON CORPORATION;TANI, YASUHISA;NIISAKA, SHUNSUKE |
发明人 |
TANI, YASUHISA;NIISAKA, SHUNSUKE |
分类号 |
G02B1/02;G02B1/10;G02B5/04;G02B27/09 |
主分类号 |
G02B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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