发明名称 MEASUREMENT DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To measure highly precisely an adsorbed amount of chemical components in air for a long time. Ž<P>SOLUTION: A measurement device 100 is provided for measuring an adsorbed amount of chemical components in air. The device 100 includes a measurement means to measure an adsorbed amount of chemical components adsorbed to a crystal oscillator 11 by exposing the crystal oscillator 11 in air and a removal means to remove the chemical components adsorbed to the crystal oscillator 11 by irradiating a main surface of the crystal oscillator with light. Thereby, the adsorbed amount of chemical components in air can be measured highly precisely for a long time. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009222413(A) 申请公布日期 2009.10.01
申请号 JP20080064296 申请日期 2008.03.13
申请人 FUJITSU MICROELECTRONICS LTD 发明人 IWATSUBO RYUJI
分类号 G01N5/02 主分类号 G01N5/02
代理机构 代理人
主权项
地址