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发明名称
形成具有圆化顶角之浅沟槽隔离区凹槽的方法
摘要
本发明提供一种形成具有圆化顶角之浅沟槽隔离区凹槽的方法,首先,提供一半导体基底,于半导体基底上形成一硬罩幕层,并以硬罩幕层为罩幕,对半导体基底进行热氧化处理;接着,以硬罩幕层为罩幕蚀刻半导体基底以在形成有硬罩幕层两侧之半导体基底形成凹槽;然后,对形成有凹槽及硬罩幕之半导体基底进行氧化处理以形成衬层,并于凹槽填入绝缘层以形成隔离区。
申请公布号
TWI315556
申请公布日期
2009.10.01
申请号
TW091118655
申请日期
2002.08.19
申请人
台湾积体电路制造股份有限公司
发明人
邱显光;陈方正
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
洪澄文;颜锦顺
主权项
一种形成具有圆化顶角之浅沟槽隔离区凹槽的方法,包括下列步骤:提供一半导体基底,于该半导体基底上形成一硬罩幕层;以该硬罩幕层为罩幕,对该半导体基底进行热氧化处理以进行第一次圆化;以该硬罩幕层为罩幕蚀刻该半导体基底以在形成有该硬罩幕层两侧之该半导体基底形成凹槽;对形成有该凹槽及该硬罩幕之该半导体基底进行氧化处理以在该凹槽表面及该硬罩幕层与该半导体基底之间形成衬层,以作为第二次圆化;及于该凹槽填入绝缘层以形成隔离区。
地址
新竹市新竹科学工业园区园区三路121号
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