| 摘要 |
PROBLEM TO BE SOLVED: To provide an amorphous carbon coated tool superior in adhesiveness between an amorphous carbon film and a base material and also superior in abrasion resistance. SOLUTION: The amorphous carbon coated tool includes a base material and an amorphous carbon film, wherein the amorphous carbon film is composed of an inner layer part of a base material side and an outer layer part of a front surface side. The hydrogen amount contained in the inner layer part of the amorphous carbon film is 0.5 atom% or more and 3 atom% or less, the hydrogen amount contained in the outer layer part of the amorphous carbon film is less than 0.5 atom%. The hydrogen amount of the inner layer part of the amorphous carbon film has a concentration gradient in which the hydrogen amount is gradually decreased toward the front surface side from the base material side. COPYRIGHT: (C)2010,JPO&INPIT
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