PROCESS FOR THE PRODUCTION OF FUMED SILICA

摘要

The invention provides a process for the production of fumed silica. The process comprises providing a silicon halide feedstock comprising about 80% to 100% methyltrichlorosilane, combining the silicon halide feedstock with hydrogen gas and oxygen gas to form a reactant mixture, discharging the reactant mixture out of a burner, and combusting the hydrogen gas and the oxygen gas of the reactant mixture so as to hydrolyze the silicon halide feedstock to produce fumed silica. Hydrogen (H2) is present in a mole fraction of about 0.11 or less based on the reactant mixture, and/or the velocity of the reactant mixture upon exiting the burner is about 25 m/s or more.