发明名称 ELECTROSTATIC TYPE LIQUID-JETTING DEVICE AND MANUFACTURING METHOD OF ELECTROSTATIC ACTUATOR
摘要 PROBLEM TO BE SOLVED: To propose an electrostatic actuator can always generate desired pressure without being influenced by a fluctuation of open air pressure, and to propose an electrostatic type liquid-jetting device can jet a liquid droplet properly. SOLUTION: The electrostatic type inkjet head 1 includes a pressure chamber 6 communicating with an ink nozzle 21 and an atmospheric chamber 12 open to the atmosphere, and a vibration plate 5 is formed on the bottom surface of the pressure chamber 6. When a voltage is impressed between the vibration plate 5 and an individual electrode 43, the vibration plate 5 is vibrated by electrostatic force to jet the ink liquid droplet. The vibration chamber 41 as a closed chamber communicates with a pressure compensation chamber 49, and a displacement plate 16 capable of being displaced in the out-of-plane direction in accordance with the fluctuation of the open air pressure is formed on the bottom surface of the pressure compensation chamber 49. When the displacement plate 16 is displaced, the volume of the pressure compensation chamber 49 increases or decreases to make the inner pressure of each vibration chamber 41 communicating with the pressure compensation chamber 49 coincide with the open air pressure. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009220586(A) 申请公布日期 2009.10.01
申请号 JP20090161552 申请日期 2009.07.08
申请人 SEIKO EPSON CORP 发明人 FUJII MASAHIRO;MARUYAMA HIROYUKI;SATO KAZUHIKO;KITAHARA KOJI;MAKIGAKI TOMOHIRO;NOJIMA SHIGEO;TAKEKOSHI TARO
分类号 B41J2/045;B41J2/055;B41J2/14;B41J2/16 主分类号 B41J2/045
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