| 摘要 |
<p>A shower plate (300) comprises a first flat plate (301), a second flat plate (302) and a third flat plate (303). Flow passages (303a) through which a heat medium flows are formed in the surface of the third flat plate (303) that faces the second flat plate (302). A lattice in which grids cross each other at approximately 90º is formed in the center area of the third flat plate (303), and the flow passages (303a) are bent at approximately 90º that is equal to the angle at which the grids cross each other. By bending the flow passages (303a) in such a manner, a large number of flow passages (303a) can be provided in particularly the center area heated to a high temperature, thereby satisfactorily cooling the shower plate.</p> |
