发明名称 |
CHARGED-PARTICLE BEAM WRITING METHOD AND CHARGED-PARTICLE BEAM WRITING APPARATUS |
摘要 |
A pattern density distribution and a dose distribution calculated using the pattern density distribution are multiplied by each other to calculate an exposure distribution. A fogging electron amount distribution is calculated using the exposure distribution and a function descriptive of a fogging spread distribution. Charge amount distributions in irradiation and non-irradiation regions are calculated using the exposure distribution and the fogging electron amount distribution. A position displacement amount distribution is calculated using the charge amount distributions and a response function for converting a charge amount to a position displacement error.
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申请公布号 |
US2009242787(A1) |
申请公布日期 |
2009.10.01 |
申请号 |
US20090409974 |
申请日期 |
2009.03.24 |
申请人 |
NUFLARE TECHNOLOGY, INC. |
发明人 |
NAKAYAMADA NORIAKI;WAKE SEIJI |
分类号 |
H01J3/14;G03F1/76;G03F1/78;G03F7/20;G21K5/10;H01L21/027 |
主分类号 |
H01J3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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