发明名称 |
METHOD FOR PRODUCTION OF NANO-POROUS SUBSTRATE |
摘要 |
Nanoporous substrate with fine pores having a diameter from 3 to 40 nm arranged with less than 60 nm periodicity is prepared by a method comprising the steps of coating amphipathic block copolymer on a substrate, forming a film containing hydrophilic cylinders aligned perpendicularly to the surface of the film on a substrate, and immersing the substrate into a solution containing an etchant. |
申请公布号 |
EP1950799(A4) |
申请公布日期 |
2009.09.30 |
申请号 |
EP20060832578 |
申请日期 |
2006.11.14 |
申请人 |
TOKYO INSTITUTE OF TECHNOLOGY |
发明人 |
IYODA, TOMOKAZU;KAMATA, KAORI;WATANABE, RYOKO |
分类号 |
H01L21/306;B82B3/00;C08J9/00;C23F1/00 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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