DRAM INCLUDING MICRO-ELECTRO MECHANICAL SYSTEM AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A DRAM including an electrical and mechanical device and a manufacturing method thereof are provided to classify the data in a cell by reducing a charge leakage of a capacitor. CONSTITUTION: A DRAM device includes a bit line(104), a contact plug(136), a conductive beam(160), a word line(146), and a capacitor(152). The bit line is located on a substrate(100). The contact plug is connected to the upper part of the bit line. The conductive beam is connected to the upper part of the contact plug. The conductive beam has a horizontal blade shape protruded to the side to be parallel to the substrate. A word line is separated from the conductive beam. A signal for mechanically moving the conductive beam is applied to the word line. The capacitor is shorted or opened with the conductive beam by the movement of the conductive beam.