| 摘要 |
A sensor module for a probe of a tactile coordinate measuring machine has a stationary module base which defines a first measurement plane. The sensor module has a support, which is moveable relative to the module base, for holding a stylus. At least one deformable connecting element movably interconnects the support and the module base. The connecting element has at least a first and a second deformable material layer which, perpendicular to the first measurement plane, are arranged offset with respect to each other. In a preferred embodiment, the sensor module is made from two single-layer module parts arranged above and attached to one another.
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