GAS PROCESSING APPARATUS,申请号KR20080073221-传众专利搜索

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发明名称	GAS PROCESSING APPARATUS
摘要
申请公布号	KR100919330(B1)	申请公布日期	2009.09.25
申请号	KR20080073221	申请日期	2008.07.25
申请人		发明人
分类号	H01L21/20;C23C16/44;C23C16/455;H01L21/00;H01L21/02;H01L21/205	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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