| 摘要 |
PROBLEM TO BE SOLVED: To restrain temperature dependency in operating a movable electrode by setting pressing force by a beam part constant regardless of temperature. SOLUTION: A fixed electrode 5 and the movable electrode 7 are arranged by facing electrode surfaces thereof to each other. One end of each beam part 6 is arranged by being fixed to a second board 2, a part from the fixed part to the other end are brought into a state lifted from the surface of the board 2, and the movable electrode 7 is formed at lifted positions of the beam parts 6. The movable electrode 7 is energized toward the fixed electrode 5 by the beam part 6 to be pressed toward the fixed electrode 5 through a stopper 10, and arranged by being spaced apart from the board 2 in the state lifted from the second board 2. The movable electrode 7 is displaced from the fixed electrode 5 side to the second board 2 side by voltage application to drive electrodes 9 to change capacitance between the electrodes 5 and 7. Stress imparting parts 8 providing tensile stress in the lifting direction from the second board 2 to the beam parts 6 are formed on the surfaces of the beam parts 6. The stress imparting part 8 is formed of the same material as that of the beam part 6, and residual stress pulling up the beam part 6 is imparted to the stress imparting part 8. COPYRIGHT: (C)2009,JPO&INPIT
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