| 摘要 |
<P>PROBLEM TO BE SOLVED: To set the spring characteristic of each of beams displacing in the substrate plane direction and in the substrate perpendicular direction to a desired value. <P>SOLUTION: A perpendicular beam 11a and a horizontal beam 11b are formed with different thicknesses. Specifically, regarding the perpendicular beam 11a, the lower position, namely support substrate 1 side, of the silicon layer 3 is removed. Thus, the spring characteristic of the perpendicular beam 11a can be made different from the spring constant of the horizontal beam 11b, and the spring characteristic of each of the beam 11a and 11b can be set at respective desired values. The height of the perpendicular beam 11a does not depend on the thickness of an embedded oxide film 2, so that the spring characteristic can be made optimal. Thus, the acceleration in the vehicle vertical direction can be detected based on the displacement of the perpendicular beam 11a having the optimal spring characteristic, and the acceleration in the vehicle longitudinal direction or in the vehicle lateral direction can be detected based on the displacement of the horizontal beam 11b having the optimal spring characteristic. <P>COPYRIGHT: (C)2009,JPO&INPIT |
