| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method and cleaning apparatus capable of concurrently rinsing a plurality of endless belts, each of which has a fixed width, uniformly and strongly. SOLUTION: A rinsing liquid flow running in a fixed direction is formed in a rinsing liquid tank, and the endless belt is disposed in the rinsing liquid tank so that a width direction thereof may be along a flowing direction of the rinsing liquid flow. Hence, a shearing force generated between the endless belt and water rinses the endless belts. COPYRIGHT: (C)2009,JPO&INPIT
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