| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing bicyclohexyl which is suitable as a liquid for immersion exposure having excellent transmittance at 193 nm by more reducing its absorbance. <P>SOLUTION: Disclosed is a method of producing bicyclohexyl having an average light transmittance at a wavelength of 193 nm of ≥99.40% per 1 mm of the optical path length by bringing raw material bicyclohexyl into contact with an adsorbent, wherein the method comprises a step of bringing the raw material bicyclohexyl into contact with the adsorbent in an atmosphere of an inert gas having a purity of ≥99.999 vol%, and after the step of bringing the bicyclohexyl as a raw material into contact with the adsorbent, installing a storage tank for temporarily storing the bicyclohexyl before it is filled into a container, and performing substitution with an inert gas in the storage tank. <P>COPYRIGHT: (C)2009,JPO&INPIT |
