发明名称 |
Vorrichtung zum Ziehen eines Halbleiterkristalls und Verfahren zum Ziehen |
摘要 |
In an apparatus for growing a semiconductor crystal from semiconductor melt, a crucible retains the semiconductor melt. An electrode contacts with the semiconductor melt and applies current to the semiconductor melt. The electrode is formed of the same material as the semiconductor crystal. |
申请公布号 |
DE19911755(B4) |
申请公布日期 |
2009.09.24 |
申请号 |
DE1999111755 |
申请日期 |
1999.03.16 |
申请人 |
NEC CORP. |
发明人 |
WATANABE, MASAHITO;EGUCHI, MINORU |
分类号 |
C30B15/00;H01L21/208;C30B15/20;C30B15/22;C30B29/06;C30B30/02;C30B30/04 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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