| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid processing device which collects the matter to be processed in a predetermined place. SOLUTION: A stripping device 1 includes a partial strip section A and an entire strip/removal section B, wherein the partial strip section A includes a roller and a paddle 40 and the entire strip/removal section B includes a roller and a shower section. The paddle 40 includes two openings for causing resist stripper 50 to overflow from the opposite ends of a liquid tank section 42. Since a glass substrate 20 is dipped in the resist stripper 50 only at the opposite edges thereof, the central portion is not stripped but the opposite ends are stripped at first. Since the resist stripper 50 is conveyed to the entire strip/removal section B and jetted entirely to the glass substrate 20, stripping of a cover film 21 progresses from the opposite edges toward the central portion, and since the cover film 21 is collected in the central portion of the glass substrate 20, the cover film 21 is prevented from piling up while being distributed irregularly. COPYRIGHT: (C)2009,JPO&INPIT |
