SUBSTRATE TRANSFER PROCESS APPARATUS

摘要

Provided is a substrate transfer process apparatus which can perform high-speed process to a substrate. A placing table (40) whereupon a substrate (7) is to be placed is provided with a board-like main body (41), and a recessed section (45) formed on the rear surface of the board-like main body (41). Since the placing table (40) has a weight lighter than that prior to having the recessed section (45) formed thereon, load of a motor is small even for high-speed transfer, and running cost is low. Since the board-like main body (41) is composed of granite, a placing surface (46) can be made smooth by polishing. The substrate (7) can be aligned with high accuracy, since the placing surface (46) is smooth.