METHOD OF RECLAIMING AND STORING A VALUABLE PROCESS GAS

摘要

Cryogenic vacuum pump method for pumping a process chamber and reclaiming process gas. The valuable process gas may include a valuable gas, such as Xenon, Krypton or other rare gases, that is too expensive to be used in a once through loop of a semiconductor processing operation. The cryogenic vacuum pump has a refrigerator and a cryogenic panel in thermal contact with the refrigerator. The cryogenic vacuum pump also has a circuit. The circuit control heating to a first temperature in which a first process gas changes from a condensed phase while at least a second process gas remains in the condensed phase. The circuit also controls heating to a second temperature to reclaim the second process gas remaining in the condensed phase once the first process gas is removed.