| 摘要 |
PROBLEM TO BE SOLVED: To provide a purge control device capable of minimizing the improvement of structures of a load port device and a processing device, and improvement of a control program. SOLUTION: A purge device 32 is used by being mounted to the load port device 3 taking workpieces out from an internal space to a clean box 2 housing the workpieces 1 and taking them in the internal space from the clean box, through an opening 10 provided on a wall, and carries out a purge processing by spouting gas toward the opening. The purge control device 31 controlling the purge device includes a transmitting and receiving means 35 electrically connected to the load port device and receiving an operation command from a higher order device 51 forming the operation command operating the load port device, and a control means 33 converting the operation command received from the higher order device into a converted operation command commanding an operation including purge processing to the load port device and the purge device. The converted operation command converted by the control means is transmitted to the load port device and the purge device by the transmitting and receiving means. COPYRIGHT: (C)2009,JPO&INPIT
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