| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro mirror device for uniformly holding an initial gap amount in a desired value and suppressing variation of the gap amount even when external force or the like occurs. SOLUTION: The micro mirror device 1 includes: a micro mirror chip 10; an electrode substrate 30 for moving the micro mirror chip 10; an intermediate spacer 50 for holding an interval between the micro mirror chip 10 and the electrode substrate 30 in a desired value by being interposed between the micro mirror chip 10 and the electrode substrate 30; and a joining member 70 for joining the micro mirror chip 10 and the electrode substrate 30. The joining member 70 incorporates a core member 71. COPYRIGHT: (C)2009,JPO&INPIT
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