发明名称 VIBRATION SUPPRESSION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a vibration suppression apparatus for suppressing vibration of a structure while controlling the deformation of the structure, although the vibration suppression apparatus includes four or more actuators that apply the force to the structure. <P>SOLUTION: A vibration suppression apparatus includes three first actuators, at least one second actuator, detectors 3a-3c, 4a-4c, and a controller 50. The first actuators support the structure 1 by applying forces to the structure 1 in the vertical direction or horizontal direction, and do not line up on the identical straight line. The detectors 3a-3c, 4a-4c detect at least one of vibration and position of the structure 1 with respect to a reference position. The controller 50 controls the forces, applied to the structure 1 by the three first actuators, based on the outputs from the detectors 3a-3c, 4a-4c. The second actuator is controlled so that a force applied to the structure 1 by the second actuator in the vertical direction or horizontal direction is maintained constant. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009212314(A) 申请公布日期 2009.09.17
申请号 JP20080054067 申请日期 2008.03.04
申请人 CANON INC 发明人 MAYAMA TAKEHIKO;TAKABAYASHI YUKIO
分类号 H01L21/027;F16F15/02;G03F7/20 主分类号 H01L21/027
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