| 发明名称 |
System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters |
| 摘要 |
An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
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| 申请公布号 |
US2009231700(A1) |
申请公布日期 |
2009.09.17 |
| 申请号 |
US20080075956 |
申请日期 |
2008.03.14 |
| 申请人 |
PFEIFFER GALEN L;LIPHARDT MARTIN M |
发明人 |
PFEIFFER GALEN L.;LIPHARDT MARTIN M. |
| 分类号 |
G02B27/28;G01J4/00 |
主分类号 |
G02B27/28 |
| 代理机构 |
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