发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that is integrated highly without falling off authenticity, and to provide a method of manufacturing a semiconductor device. SOLUTION: The semiconductor device includes aluminum stack structure, in which an aluminum layer is laminated just above a contact layer 40 and an aluminum layer. A first aluminum layer 10 is laminated just above the contact layer 40, a second aluminum layer 20 is laminated just above the first aluminum layer 10, and a third aluminum layer 30 is laminated just above the second aluminum layer 20. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009212368(A) 申请公布日期 2009.09.17
申请号 JP20080055081 申请日期 2008.03.05
申请人 DENSO CORP 发明人 AKAMATSU KAZUO
分类号 H01L21/768;H01L21/3205;H01L23/52 主分类号 H01L21/768
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