PROBE INSPECTING DEVICE, DISPLACEMENT CORRECTING METHOD, INFORMATION PROCESSOR, INFORMATION PROCESSING METHOD, AND PROGRAM

摘要

[PROBLEMS] To always and optimally keep the contact position of a probe needle even if the probe needle is brought into contact with the negative electrode pad by appropriately correcting the displacement of the contact position of the probe needle. [MEANS FOR SOLVING PROBLEMS] In a probe inspecting device (100) a CCD camera (6) captures a pre-contact image (51) and a post-contact image (52) of a probe needle (8a) brought into contact with each pad (40) of a chip (30) by means of a CCD camera (6), and an image processing PC (10) extracts a difference image (53) of the images, calculates the displacement value between the position of the latest needle trace (41b) shown in the difference image (53) and a target position for each pad (30), calculates the overall correction of the probe card (8) from each displacement value, and corrects the displacement by reflecting the correction on the inspection of each pad (40) of the chip (30) to be inspected next.