| 摘要 |
A coordinate measuring machine using the reference plate is provided to correct the coordinate by determining the error due to the drooping of the machine. A coordinate measuring machine includes a target object(200), a measuring unit(20) and a reference plate. The measuring unit is installed on top of the target object. The measuring unit is combined on the X-axis stage(30) in order to be moved from side to side. The reference plate is fixed on top of the measuring unit. The measuring unit comprises a light source(21), a spectroscope(22), a first mirror(23), a second mirror(24), a first interferometer(25a), a second interferometer(25b) and a receiver(26). The light source irradiates the light. The spectroscope splits the light radiated from the light source. The first mirror reflects the light which is split into the lower part through spectroscope. The second mirror reflects the light from the spectroscope and the first mirror.
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