| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a perpendicular magnetic recording medium which reduces a magnetic crystal grain size of a granular magnetic layer as a recording layer by reducing the size of the crystal grain of a first base layer in an Ru base layer in the double layer structure. SOLUTION: The lower base layer 14 is formed by depositing Ru or Ru alloy on a soft magnetic backing layer 12 in inert gas atmosphere including carbon oxygen. The upper base layer 15 is formed by depositing Ru or Ru alloy on the lower base layer 14 in inert gas atmosphere. The magnetic layer 16 including the magnetic crystal grains 16a is formed on the upper base layer 15. COPYRIGHT: (C)2009,JPO&INPIT
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