| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve system throughput by coordinating semiconductor manufacturing equipment, a storage device or the like through a storage area network for communicating a large amount of image data or a design data at high speed. Ž<P>SOLUTION: The system includes semiconductor manufacturing equipment 20 having an exposing part, a control unit for controlling the exposing part, and a storage device; semiconductor inspection equipment 10 having an observation part, a control unit for controlling the observation part, and a storage device; and a storage device 30 commonly used by the semiconductor device and the semiconductor inspection device. The semiconductor inspection device 10, the semiconductor manufacturing equipment 20, and the commonly used storage device 30 are connected through the storage area network 40. Ž<P>COPYRIGHT: (C)2008,JPO&INPIT Ž</p> |
