发明名称
摘要 <P>PROBLEM TO BE SOLVED: To offer a vibration actuator which excels in durability and shortens the aging time and lowers the cost and besides can suppress the occurrence of extraneous sound and excels in productivity, and its manufacturing method. <P>SOLUTION: An elastic body 12 is an annular member which has two or more projections 12a, and as for two or more projections 12a, each sliding face 12b with a movable body 13 is roughly circular when viewed from radial direction. For this roughly circular sliding face 12b, it is to be desired that the amount &delta; of sag which is obtained by subtracting the height of one end from the height of the center should be 1/10 through 1/1 to both amplitudes in the vertical direction to the sliding face of the tip of this projection 12a. For example, in case that the width w1 of the projection 12a is approximately 2.0mm, the width w2 of a groove is approximately 1.0mm, and the amplitude in the vertical direction to the sliding face is approximately &plusmn;2.0&mu;m. the amount &delta; of sag becomes approximately 0.4&mu;m to 4.0&mu;m. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP4333179(B2) 申请公布日期 2009.09.16
申请号 JP20030084869 申请日期 2003.03.26
申请人 发明人
分类号 H01L41/09;H02N2/00;H01L41/22;H01L41/337 主分类号 H01L41/09
代理机构 代理人
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