摘要 |
<P>PROBLEM TO BE SOLVED: To extend the operating life time of a vibration wave motor by reducing the wear of a frictional contact surface and stabilizing the drive performance. <P>SOLUTION: This vibration wave motor 10 has elastic elements 12 and a mover 13, which is moved relatively between the elastic elements 12. One side frictional contact surface of the mover 13, brought into contact with the elastic element 12, is composed of a hard alumite film (porous oxide film layer) 17, and the film is partially removed. The porous oxide film layer is formed on a surface of an aluminum or aluminum alloy surface through anode oxidation treatment. <P>COPYRIGHT: (C)2003,JPO |