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发明名称
Method and apparatus for production of metal film
摘要
申请公布号
EP1512769(B1)
申请公布日期
2009.09.16
申请号
EP20040026950
申请日期
2003.03.04
申请人
CANON ANELVA CORPORATION
发明人
SAKAMOTO, HITOSHI;YAHATA, NAOKI;NISHIMORI, TOSHIHIKO;OOBA, YOSHIYUKI;TONEGAWA, HIROSHI;KOSHIRO, IKUMASA;OGURA, YUZURU
分类号
C23C16/08;C23C16/14;C23C16/44;C23C16/448;H01J37/32;H01L21/285;H01L21/44;H01L21/768
主分类号
C23C16/08
代理机构
代理人
主权项
地址
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