发明名称 FEEDBACK FOR BUFFER LAYER DEPOSITION
摘要 Improved methods and apparatus for forming thin film layers of chalcogenide on a substrate web. According to the present teachings, a feedback control system may be employed to measure one or more properties of the web and/or the chalcogenide layer, and to adjust one or more parameters of the system or buffer layer deposition method in response to the measurement.
申请公布号 WO2009111055(A1) 申请公布日期 2009.09.11
申请号 WO2009US01432 申请日期 2009.03.04
申请人 GLOBAL SOLAR ENERGY, INC.;BRITT, JEFFREY, S.;ALBRIGHT, SCOT;SCHOOP, URS 发明人 BRITT, JEFFREY, S.;ALBRIGHT, SCOT;SCHOOP, URS
分类号 G06F19/00 主分类号 G06F19/00
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