Improved methods and apparatus for forming thin film layers of chalcogenide on a substrate web. According to the present teachings, a feedback control system may be employed to measure one or more properties of the web and/or the chalcogenide layer, and to adjust one or more parameters of the system or buffer layer deposition method in response to the measurement.
申请公布号
WO2009111055(A1)
申请公布日期
2009.09.11
申请号
WO2009US01432
申请日期
2009.03.04
申请人
GLOBAL SOLAR ENERGY, INC.;BRITT, JEFFREY, S.;ALBRIGHT, SCOT;SCHOOP, URS