| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a vacuum airtight container which activates nonevaporable getters having different activation temperatures with no necessity for a process to give an external energy other than the heat in a baking step. SOLUTION: The method for manufacturing a vacuum airtight container includes STEP 2 of raising the temperature of a vacuum atmosphere to a temperature, T1, to activate a first NEG 15 to activate the first NEG 15 only. The method for manufacturing a vacuum airtight container includes, after the first NEG 15 includes been activated, STEP 4 of raising the temperature of the vacuum atmosphere to a temperature, T2, to activate a second NEG 27 to activate the second NEG 27. These STEP 2 and STEP 4 finish in the baking step. COPYRIGHT: (C)2009,JPO&INPIT
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