Method for manufacturing solar cells, involves providing semiconductor substrate and doping, particularly n-doping by phosphoric acid, where semiconductor substrate is damped for structuring with etchant

摘要

The method involves providing a semiconductor substrate and doping, particularly n-doping by phosphoric acid. The semiconductor substrate is damped for structuring with an etchant, which is a reaction evocative mixture that produces corrosive reaction product. The reaction product is added in course of the starting process of the inline process of the etchant. An independent claim is included for an inline device for manufacturing solar cells.