| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a nozzle plate by which a nozzle plate is efficiently manufactured by filling a hole with resist in a short time, and to provide a liquid jet head. SOLUTION: The nozzle plate is manufactured through: a film coating stage for coating a surface of a metal plate 31 with a resist film 24; a punching stage for driving a punch 36 to the metal plate from the surface coated with the resist film, so as to open a hole with a bottom 25 in such a state that a swollen part 31c is formed on a surface on an opposite side to the surface coated with the resist film, and pressing a part 24' of the resist film into the bottom of the hole by the punch, so as to fill the hole therewith; a lapping stage for grinding and removing the swollen part swollen on the surface on the opposite side to the surface coated with the film of the metal plate, so as to expose the resist film in the hole to the surface of the metal plate; a surface treatment stage for applying surface treatment to the surface of the metal plate in such a state that the resist film in the hole is exposed to the surface of the metal plate and covers an opening, so as to form a water repellent plating layer 26; and a resist removing stage for rinsing and removing the resist film after the surface treatment stage. COPYRIGHT: (C)2009,JPO&INPIT
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