| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate mounting device to a table, performing alignment in such a manner as to prevent a substrate from being scratched. SOLUTION: A substrate mounting device is provided with: an elevating/lowering pin 4 for mounting a substrate on the surface 3a of a table by lowering it while supporting its peripheral section; and a rotator 5 that is provided in the position in the middle of the lowering motion before the substrate reaches and contacts the surface of the table, contacts or separates from the periphery of the substrate along the direction of the lowering motion in order to position the substrate to the table on the elevating/lowering pin, and delivers the periphery of the substrate in contact therewith toward the center of the table in a horizontal direction. COPYRIGHT: (C)2009,JPO&INPIT |
