Wanderfeldröhre und Verfahren zur Herstellung von dreidimensionalen Wanderfeldröhrenschaltungselementen mittels Photolithographie

摘要

A method for constructing thermally and dimensionally stable traveling wave tube circuits having high dimensional stability, narrow tolerances, and very small size by providing (201) a small hollow preform constructed of a desired material which is coated (203) with a layer of photoresist material then exposed (205) to a UV laser to form (207) a desired pattern'mask in the photoresist layer. The pattern masked preform is then etched (209) to create a preform having a desired shape. After shaping, the photoresist coating is stripped (211) from said shaped preform to form a traveling wave tube circuit. The traveling wave tube circuit may optionally be polished (213). Additionally, the present invention contemplates fabricating a dimensionally stable traveling wave tube circuit element using such methods.