| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection method with the effects of imaging conditions, lighting conditions, design conditions for cyclic patterns, etc., removed therefrom as far as possible. SOLUTION: In this defect inspection method for detecting streaky irregularities on an inspected body having cyclic patterns, intensity distribution of refracted light on the inspected body caused by illumination from a light source is acquired at a plurality of lighting angles to compare a plurality of inspection images of different lighting angles with a plurality of inspection images of different lighting angles to the inspected body, with the intensity distribution of the refracted light at the respective lighting angles acquired as inspection images. Streaky irregularities with their positions changing according to a light application angle to the inspected body and streaky irregularities with their positions unchanging are extracted to classify the streaky irregularities with their positions changing as pseudo defects which are not regarded as defects in inspection. As to the streaky irregularities with their positions unchanging classified as defects in inspection, defect scale is evaluated based on respective maximum luminances and pattern pitch normalized areas. COPYRIGHT: (C)2009,JPO&INPIT
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