| 摘要 |
PROBLEM TO BE SOLVED: To prevent a gas leak from being caused as a brazing material layer joining a ceramic plate body and a cylindrical body forming a wafer support member corrodes with a corrosive gas. SOLUTION: The wafer support member includes a ceramic plate body having a mount surface where a wafer is placed on one principal surface, the cylindrical body having an end joined to the other principal surface of the ceramic plate body through the brazing material layer, and a gas supply unit which supplies a gas to nearby a side end on an outer peripheral side of the brazing material layer. COPYRIGHT: (C)2009,JPO&INPIT |
